This file serves as documentation for the other files in this folder

fig1c.xlsx contains the data of 'S21 parameter for the outer and inner SRRs individually'.

fig2c.xlsx contains the data of 'S21 parameter for relative distance d = 10um and 140um'.

fig2d.xlsx contains the data of 'A series of S21 parameter as a function of relative distance'.

fig4a.xlsx contains the data of 'S21 parameter for a cantilever at a relative distance of d = 10um and radii 0.1m, 0.01m and 57um.

fig4b.xlsx contains the data of 'A series of S21 parameter for a integrated SRR cantilever with relative distance d = 10um as a function of radius'.

fig4c.xlsx contains the data of 'S21 parameter for a cantilever at a relative distance of d = 140um and radii 0.1m, 0.01m and 57um'.

fig4d.xlsx contains the data of 'A series of S21 parameter for a integrated SRR cantilever with relative distance d = 140um as a function of radius'.

fig5a.xlsx contains the data of 'The coupling strength of the integrated SRR cantilever as a function of relative distance'.

fig5b.xlsx contains the data of 'A series of S21 parameter for the SRRs at a relative distance of d = 10um as a function of the outer SRR resonant frequency'.