These files give the data associated with the publication "Sputter-engineering a first-order magnetic phase transition in sub-15-nm-thick single-crystal FeRh films" by L. Benito, L. Clark, T. P. Almeida, T. A. Moore, D. McGrouther, S. McVitie, and C. H. Marrows, Phys. Rev. Materials 4, 123402 – Published 3 December 2020, https://doi.org/10.1103/PhysRevMaterials.4.123402. Aside from this readme file there are three other files: - MGR1008M_Source-data_set1.ods contains the data for Figs 1, 3, 4, 7 and 8 - FeRh_pics.zip contains TEM images for figure 2. - MGR1008M_Source_data_set2_Figure 6 pics.rar contains AFM images for figure 6.