This file serves as documentation for the other files in this folder fig1d.xlsx contains the data of 'S21 parameter without dielectric loading'. fig2b.xlsx contains the data of 'S21 parameter with 1-um-thick S1813 layer loading'. fig2c.xlsx contains the data of 'S21 parameter as a function of S1813 film thickness'. fig2e.xlsx contains the data of 'A series of S21 parameter vs partial loading position'. fig2f.xlsx contains the data of 'S21 parameter as a function of S1813 thickness, partial loading on R2'. fig3a.xlsx contains the data of 'S21 parameter for permittivity of 1 and 3'. fig3b.xlsx contains the data of 'Relationship between resonant frequency and the permittivity'. fig3c.xlsx contains the data of 'S21 parameter for various loss tangent values, with 50-um-thick S1813'. fig4a.xlsx contains the data of 'S21 parameter with and without the depositio of the test material'. fig4b.xlsx contains the data of 'Permittivity of the test material and the extracted permittivity at multiple frequencies'.