This file serves as documentation for the other files in this folder

fig1c.xlsx contains the data of THz transmission for various etch depths.

fig1d.xlsx contains the data of LC resonant frequency as a function of etch depth.

fig2a.xlsx contains the data of E-field distribution of the device without etching.

fig2b.xlsx contains the data of E-field distribution of the device with etching.

fig2c.xlsx contains the data of E-field distribution of the device as a function of z position with/without etching.

fig3a.xlsx contains the data of Effective refractive index as a function of etch depth.

fig3b.xlsx contains the data of Coefficient as a function of etch depth.

fig4b.xlsx contains the data of THz transmission comparison for different etch depth,liquid thickness.

fig4c.xlsx contains the data of Resonant frequency shift vs liquid thickness for different etch depth.