Research Data Leeds Repository

Dataset associated with 'Non-invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films'

Chudpooti, Nonchanutt and Doychinov, Viktor and Akkaraekthalin, Prayoot and Robertson, Ian and Somjit, Nutapong (2018) Dataset associated with 'Non-invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films'. University of Leeds. [Dataset]

Dataset description

This work presents a low-cost non-invasive millimeter-wave surface-height measurement sensor of dielectric and polymer films on glass and quartz substrates. The surface-height profiler utilizes near-field resonance measurement technique operating at 96 GHz implemented by using a single complementary split-ring resonator (CSRR) integrated with a tailor-made WR10 rectangular waveguide. By placing a glass or quartz substrate uniformly coated with SU-8 photoresist on top of the CSRR, the thickness of the SU-8 polymer can be extracted based on the reflected and transmitted electromagnetic-wave energy interacting at the electrical boundary between the substrate and polymer film. Uniform single layers of SU-8 polymer with thicknesses from 3 to 13 μm, coated on top of glass substrate are measured and characterized. The extracted polymer-film thicknesses from the sensor in this work show an agreement of higher than 95% as compared to the commercial surface profiler instrument, while offering various advantages e.g. non-invasion, ease of measurement setup, low-cost and miniaturization.

Keywords: non-invasive measurement, millimeter-wave sensor, thickness characterization, SU-8 photoresist, W-band
Subjects: H000 - Engineering > H600 - Electronic & electrical engineering
Divisions: Faculty of Engineering > School of Electronic and Electrical Engineering
Related resources:
License: Creative Commons Attribution 4.0 International (CC BY 4.0)
Date deposited: 27 Feb 2018 10:16



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