Research Data Leeds Repository

Dataset associated with 'Non-invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films'

Citation

Chudpooti, Nonchanutt and Doychinov, Viktor and Akkaraekthalin, Prayoot and Robertson, Ian and Somjit, Nutapong (2018) Dataset associated with 'Non-invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films'. University of Leeds. [Dataset] https://doi.org/10.5518/323¹

Dataset description

This work presents a low-cost non-invasive millimeter-wave surface-height measurement sensor of dielectric and polymer films on glass and quartz substrates. The surface-height profiler utilizes near-field resonance measurement technique operating at 96 GHz implemented by using a single complementary split-ring resonator (CSRR) integrated with a tailor-made WR10 rectangular waveguide. By placing a glass or quartz substrate uniformly coated with SU-8 photoresist on top of the CSRR, the thickness of the SU-8 polymer can be extracted based on the reflected and transmitted electromagnetic-wave energy interacting at the electrical boundary between the substrate and polymer film. Uniform single layers of SU-8 polymer with thicknesses from 3 to 13 μm, coated on top of glass substrate are measured and characterized. The extracted polymer-film thicknesses from the sensor in this work show an agreement of higher than 95% as compared to the commercial surface profiler instrument, while offering various advantages e.g. non-invasion, ease of measurement setup, low-cost and miniaturization.

Keywords:	non-invasive measurement, millimeter-wave sensor, thickness characterization, SU-8 photoresist, W-band
Subjects:	H000 - Engineering > H600 - Electronic & electrical engineering2
Divisions:	Faculty of Engineering and Physical Sciences > School of Electronic and Electrical Engineering3
Related resources:	Location Type https://doi.org/10.1109/JSEN.2018.28061854 Publication https://eprints.whiterose.ac.uk/126916/5 Publication
License:	Creative Commons Attribution 4.0 International (CC BY 4.0)
Date deposited:	27 Feb 2018 10:16
URI:	https://archive.researchdata.leeds.ac.uk/id/eprint/3216
Additional details Additional details Creators or authors: Creators ORCID Other ID Email Primary affiliation Primary affiliation ID Primary affiliation ID type Secondary affiliation Secondary affiliation ID Secondary affiliation ID type Chudpooti, Nonchanutt https://orcid.org/0000-0002-7239-99687 King Mongkut's University of Technology North Bangkok https://ror.org/04fy6jb97 ror Doychinov, Viktor https://orcid.org/0000-0001-6730-00578 University of Leeds https://ror.org/024mrxd33 ror Akkaraekthalin, Prayoot https://orcid.org/0000-0001-6520-07659 King Mongkut's University of Technology North Bangkok https://ror.org/04fy6jb97 ror Robertson, Ian https://orcid.org/0000-0003-1522-207110 University of Leeds https://ror.org/024mrxd33 ror Somjit, Nutapong https://orcid.org/0000-0003-1981-261811 University of Leeds https://ror.org/024mrxd33 ror Type of data: Dataset Research funders: Thailand Research fund through the TRF Senior Research Scholar Program and Royal Golden Jubilee Ph.D. Program Grant numbers: RTA6080008, PHD/0093/2557 Publication date: 2018 Resource language: English Metadata language: English Publisher: University of Leeds Contact email: c.nonchanutt@gmail.com12 Last Modified: 08 Aug 2024 13:19

Files

Data

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• 1. https://doi.org/10.5518/323
• 2. https://archive.researchdata.leeds.ac.uk/view/subjects/H600.html
• 3. https://archive.researchdata.leeds.ac.uk/view/divisions/SEEE/
• 4. https://doi.org/10.1109/JSEN.2018.2806185
• 5. https://eprints.whiterose.ac.uk/126916/
• 6. https://archive.researchdata.leeds.ac.uk/id/eprint/321
• 7. https://orcid.org/0000-0002-7239-9968
• 8. https://orcid.org/0000-0001-6730-0057
• 9. https://orcid.org/0000-0001-6520-0765
• 10. https://orcid.org/0000-0003-1522-2071
• 11. https://orcid.org/0000-0003-1981-2618
• 12. mailto:c.nonchanutt@gmail.com
• 13. https://archive.researchdata.leeds.ac.uk/321/1/data_for_figure_5.xlsx
• 14. https://archive.researchdata.leeds.ac.uk/321/1/data_for_figure_5.xlsx
• 15. https://archive.researchdata.leeds.ac.uk/321/1/data_for_figure_5.xlsx
• 16. https://archive.researchdata.leeds.ac.uk/321/1/data_for_figure_5.xlsx
• 17. https://archive.researchdata.leeds.ac.uk/321/2/data_for_figure_6.xlsx
• 18. https://archive.researchdata.leeds.ac.uk/321/2/data_for_figure_6.xlsx
• 19. https://archive.researchdata.leeds.ac.uk/321/2/data_for_figure_6.xlsx
• 20. https://archive.researchdata.leeds.ac.uk/321/2/data_for_figure_6.xlsx
• 21. https://archive.researchdata.leeds.ac.uk/321/3/data_for_figure_7.xlsx
• 22. https://archive.researchdata.leeds.ac.uk/321/3/data_for_figure_7.xlsx
• 23. https://archive.researchdata.leeds.ac.uk/321/3/data_for_figure_7.xlsx
• 24. https://archive.researchdata.leeds.ac.uk/321/3/data_for_figure_7.xlsx
• 25. https://archive.researchdata.leeds.ac.uk/321/4/data_for_figure_9.xlsx
• 26. https://archive.researchdata.leeds.ac.uk/321/4/data_for_figure_9.xlsx
• 27. https://archive.researchdata.leeds.ac.uk/321/4/data_for_figure_9.xlsx
• 28. https://archive.researchdata.leeds.ac.uk/321/4/data_for_figure_9.xlsx
• 29. https://archive.researchdata.leeds.ac.uk/321/5/data_for_figure_10.xlsx
• 30. https://archive.researchdata.leeds.ac.uk/321/5/data_for_figure_10.xlsx
• 31. https://archive.researchdata.leeds.ac.uk/321/5/data_for_figure_10.xlsx
• 32. https://archive.researchdata.leeds.ac.uk/321/5/data_for_figure_10.xlsx