Alpha Tilt	0.00°
Beta Tilt	0.00°
Accelerating voltage	100.0 kv
Probe convergence half angle	1.50 mrad
Probe current	200.0 pA
Probe size	1.489 nm
BF collection angle	(0.00 - 20.46) mrad
ADF collection angle	(20.03 - 200.28) mrad
Timestamp	2025-02-21 11:42:39.1
